Article Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to ...
Abstract: This work describes a hybrid micro-electro-mechanical-systems (MEMS) microphone based on combined piezoelectric and capacitive transduction mechanisms to enhance the sensitivity. The ...
Key Laboratory of Polar Materials and Devices, Ministry of Education, Department of Electronics, East China Normal University, Shanghai 200241, China ...
Abstract: The piezoelectric actuator is a kind of actuation device that acts through the inverse piezoelectric effect. Due to advantages of high precision, low power consumption, compact size, and ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback