As design rules shrink to 45-nm and smaller, defect and yield engineers are becoming increasingly concerned about the quality of the defect frequency data coming from their review tools. To allow ...

SAN JOSE , USA: KLA-Tencor has introduced the eDR-5200, a new-generation wafer defect review and classification system that leverages advances in resolution and defect re-detection sensitivity, along ...

Cell-aware diagnosis is a new and effective way to detect defects inside standard cells. Industry standard failure analysis (FA) results from a major foundry show that cell-aware diagnosis is very ...